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Nánai L; Vajtai Róbert; Kiss János; Luches A; Mihailescu IN:
Smooth vanadium-nitride layers created on silicon substrates by puse layer deposition methodes.
PROCEEDINGS OF SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING, 3573.
pp. 104-107.
ISSN 0277-786X
(1998)