Nánai L and Vajtai Róbert and Kiss János and Luches A and Mihailescu IN:
Smooth vanadium-nitride layers created on silicon substrates by puse layer deposition methodes.
PROCEEDINGS OF SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING, 3573.
pp. 104-107.
ISSN 0277-786X
(1998)
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| Item Type: | Journal Article | |||||
| Journal or Publication Title: | PROCEEDINGS OF SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING | |||||
| Date: | 1998 | |||||
| Volume: | 3573 | |||||
| Page Range: | pp. 104-107 | |||||
| ISSN: | 0277-786X | |||||
| Faculty/Unit: | Faculty of Science and Mathematics | |||||
| Institution: | Other Institution | |||||
| Language: | English | |||||
| MTMT rekordazonosító: | 1077658 | |||||
| Date Deposited: | 2015. Sep. 21. 15:58 | |||||
| Last Modified: | 2022. Nov. 25. 13:34 | |||||
| URI: | http://publicatio.bibl.u-szeged.hu/id/eprint/5563 |
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