Smooth vanadium-nitride layers created on silicon substrates by puse layer deposition methodes

Nánai, L, Vajtai, Róbert, Kiss, János, Luches, A, Mihailescu, IN: Smooth vanadium-nitride layers created on silicon substrates by puse layer deposition methodes.
PROCEEDINGS OF SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING, 3573. pp. 104-107. ISSN 0277-786X (1998)

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Item Type: Article
Journal or Publication Title: PROCEEDINGS OF SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING
Date: 1998
Volume: 3573
Page Range: pp. 104-107
ISSN: 0277-786X
Institution: Más intézmény
MTMT id: 1077658
Date Deposited: 2015. Sep. 21. 15:58
Last Modified: 2017. Oct. 19. 13:17
URI: http://publicatio.bibl.u-szeged.hu/id/eprint/5563

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