Pan Yunxiang; Ehrhardt Martin; Lorenz Pierre; Han Bing; Hopp Béla; Vass Csaba; Ni Xiaowu; Zimmer Klaus:
Influence of the confinement on laser-induced dry etching at the rear side of fused silica.
APPLIED PHYSICS A - MATERIALS SCIENCE AND PROCESSING, 122 (4).
Terjedelem: 9 p.-Azonosító: 365.
ISSN 0947-8396
(2016)
Pan Yunxiang; Ehrhardt Martin; Lorenz Pierre; Han Bing; Hopp Béla; Vass Csaba; Ni Xiaowu; Zimmer Klaus:
Multi-pulse LIBDE of fused silica at different thicknesses of the organic absorber layer.
APPLIED SURFACE SCIENCE, 359.
pp. 449-454.
ISSN 0169-4332
(2015)