Pan Yunxiang and Ehrhardt Martin and Lorenz Pierre and Han Bing and Hopp Béla and Vass Csaba and Ni Xiaowu and Zimmer Klaus:
Influence of the confinement on laser-induced dry etching at the rear side of fused silica.
APPLIED PHYSICS A - MATERIALS SCIENCE AND PROCESSING, 122 (4).
Terjedelem: 9 p.-Azonosító: 365.
ISSN 0947-8396
(2016)
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| Item Type: | Journal Article |
|---|---|
| Journal or Publication Title: | APPLIED PHYSICS A - MATERIALS SCIENCE AND PROCESSING |
| Date: | 2016 |
| Volume: | 122 |
| Number: | 4 |
| Page Range: | Terjedelem: 9 p.-Azonosító: 365 |
| ISSN: | 0947-8396 |
| Publisher: | Springer-Verlag |
| Faculty/Unit: | Faculty of Science and Informatics |
| Institution: | Szegedi Tudományegyetem |
| Language: | English |
| MTMT rekordazonosító: | 3043506 |
| DOI azonosító: | https://doi.org/10.1007/s00339-016-9925-x |
| Date Deposited: | 2017. May. 11. 16:58 |
| Last Modified: | 2019. Oct. 17. 13:50 |
| URI: | http://publicatio.bibl.u-szeged.hu/id/eprint/9089 |
| Web of Science® Times Cited: 5 | View citing articles in Web of Science® |
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