Vass Csaba; Osvay Károly; Hopp Béla; Bor Zsolt: 104 nm Period Grating Fabrication in Fused Silica by Immersion Two-beam Interferometric Laser Induced Backside Wet Etching Technique.
APPLIED PHYSICS A - MATERIALS SCIENCE AND PROCESSING, 87 (4). pp. 611-613. ISSN 0947-8396 (2007)