Vass Csaba and Osvay Károly and Hopp Béla and Bor Zsolt:
104 nm Period Grating Fabrication in Fused Silica by Immersion Two-beam Interferometric Laser Induced Backside Wet Etching Technique.
APPLIED PHYSICS A - MATERIALS SCIENCE AND PROCESSING, 87 (4).
pp. 611-613.
ISSN 0947-8396
(2007)
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| Item Type: | Journal Article |
|---|---|
| Journal or Publication Title: | APPLIED PHYSICS A - MATERIALS SCIENCE AND PROCESSING |
| Date: | 2007 |
| Volume: | 87 |
| Number: | 4 |
| Page Range: | pp. 611-613 |
| ISSN: | 0947-8396 |
| Publisher: | Springer-Verlag |
| Faculty/Unit: | Faculty of Science and Informatics |
| Institution: | Szegedi Tudományegyetem |
| Language: | English |
| MTMT rekordazonosító: | 1083961 |
| DOI azonosító: | https://doi.org/10.1007/s00339-007-3891-2 |
| Date Deposited: | 2017. May. 12. 14:50 |
| Last Modified: | 2019. Oct. 16. 09:19 |
| URI: | http://publicatio.bibl.u-szeged.hu/id/eprint/9098 |
| Web of Science® Times Cited: 28 | View citing articles in Web of Science® |
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