104 nm Period Grating Fabrication in Fused Silica by Immersion Two-beam Interferometric Laser Induced Backside Wet Etching Technique

Vass, Csaba, Osvay, Károly, Hopp, Béla, Bor, Zsolt: 104 nm Period Grating Fabrication in Fused Silica by Immersion Two-beam Interferometric Laser Induced Backside Wet Etching Technique.
APPLIED PHYSICS A - MATERIALS SCIENCE AND PROCESSING, 87 (4). pp. 611-613. ISSN 0947-8396 (2007)

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Item Type: Article
Journal or Publication Title: APPLIED PHYSICS A - MATERIALS SCIENCE AND PROCESSING
Date: 2007
Volume: 87
Number: 4
Page Range: pp. 611-613
ISSN: 0947-8396
Publisher: Springer-Verlag
Faculty: Faculty of Science and Informatics
Institution: Szegedi Tudományegyetem
MTMT id: 1083961
DOI id: https://doi.org/10.1007/s00339-007-3891-2
Date Deposited: 2017. May. 12. 14:50
Last Modified: 2019. Oct. 16. 09:19
URI: http://publicatio.bibl.u-szeged.hu/id/eprint/9098
Web of Science® Times Cited: 28 View citing articles in Web of Science®

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