Szabó Péter Imre; Ugi Dávid; Gilicze Barnabás; Dankházi Zoltán; Lipcsei Sándor; Homik Zsolt; Tóth Zsolt: Micromachining using the high energy flat-top beam of a femtosecond pulse UV laser system: micropillar prefabrication.
APPLIED PHYSICS A - MATERIALS SCIENCE AND PROCESSING, 129 (6). ISSN 0947-8396 (2023)