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Micromachining using the high energy flat-top beam of a femtosecond pulse UV laser system: micropillar prefabrication

Szabó Péter Imre and Ugi Dávid and Gilicze Barnabás and Dankházi Zoltán and Lipcsei Sándor and Homik Zsolt and Tóth Zsolt: Micromachining using the high energy flat-top beam of a femtosecond pulse UV laser system: micropillar prefabrication.
APPLIED PHYSICS A - MATERIALS SCIENCE AND PROCESSING, 129 (6). ISSN 0947-8396 (2023)

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Creators:
Szabó Péter Imre MTMT
Ugi Dávid MTMT
Gilicze Barnabás MTMT
Dankházi Zoltán MTMT
Lipcsei Sándor
Homik Zsolt MTMT
Tóth Zsolt MTMT
Item Type: Journal Article
Journal or Publication Title: APPLIED PHYSICS A - MATERIALS SCIENCE AND PROCESSING
Date: 2023
Volume: 129
Number: 6
Number of Pages: 9
Publication identifier: 403
ISSN: 0947-8396
Faculty/Unit: Albert Szent-Györgyi Medical School
Faculty of Science and Informatics
Institution: University of Szeged (2000-)
Language: English
MTMT rekordazonosító: 33871039
DOI azonosító: https://doi.org/10.1007/s00339-023-06679-x
Date Deposited: 2025. Feb. 11. 15:30
Last Modified: 2025. Feb. 11. 15:30
URI: http://publicatio.bibl.u-szeged.hu/id/eprint/35991

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