Lohner Tivadar; Németh Attila; Zolnai Zsolt; Kalas Benjamin; Romanenko Alekszej; Nguyen Quoc Khánh; Szilágyi Edit; Kótai Endre; Agócs Emil; Tóth Zsolt; Budai Judit; Petrik Péter; Fried Miklós; Bársony István; Gyulai József: Disorder and cavity evolution in single-crystalline Ge during implantation of Sb ions monitored in-situ by spectroscopic ellipsometry.
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 152. ISSN 1369-8001 (2022)