Lohner Tivadar and Németh Attila and Zolnai Zsolt and Kalas Benjamin and Romanenko Alekszej and Nguyen Quoc Khánh and Szilágyi Edit and Kótai Endre and Agócs Emil and Tóth Zsolt and Budai Judit and Petrik Péter and Fried Miklós and Bársony István and Gyulai József:
Disorder and cavity evolution in single-crystalline Ge during implantation of Sb ions monitored in-situ by spectroscopic ellipsometry.
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 152.
ISSN 1369-8001
(2022)
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| Item Type: | Journal Article |
|---|---|
| Journal or Publication Title: | MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING |
| Date: | 2022 |
| Volume: | 152 |
| Number of Pages: | 11 |
| Publication identifier: | 107062 |
| ISSN: | 1369-8001 |
| Faculty/Unit: | ELI-HU Albert Szent-Györgyi Medical School Faculty of Science and Informatics |
| Institution: | Szegedi Tudományegyetem |
| Language: | English |
| MTMT rekordazonosító: | 33077841 |
| DOI azonosító: | https://doi.org/10.1016/j.mssp.2022.107062 |
| Date Deposited: | 2023. Jan. 17. 09:10 |
| Last Modified: | 2023. Jan. 17. 09:10 |
| URI: | http://publicatio.bibl.u-szeged.hu/id/eprint/26205 |
| Web of Science® Times Cited: 2 | View citing articles in Web of Science® |
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