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Lohner Tivadar; Németh Attila; Zolnai Zsolt; Kalas Benjamin; Romanenko Alekszej; Nguyen Quoc Khánh; Szilágyi Edit; Kótai Endre; Agócs Emil; Tóth Zsolt; Budai Judit; Petrik Péter; Fried Miklós; Bársony István; Gyulai József:
Disorder and cavity evolution in single-crystalline Ge during implantation of Sb ions monitored in-situ by spectroscopic ellipsometry.
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 152.
ISSN 1369-8001
(2022)
Petrik Péter; Lohner Tivadar; Égerházi László; Geretovszky Zsolt:
Optical models for the ellipsometric characterization of carbon nitride layers prepared by inverse pulsed laser deposition.
APPLIED SURFACE SCIENCE, 253 (1).
pp. 173-176.
ISSN 0169-4332
(2006)
