%I szte
%L publicatio9236
%T Ellipsometric analysis of silicon surfaces textured by ns and sub-ps KrF laser pulses
%R 2537453
%N 3
%D 2014
%P 631-636
%J THIN SOLID FILMS
%A  TĂłth Zsolt
%A  Hanyecz IstvĂĄn
%A  GĂĄrdiĂĄn Anett
%A  Budai Judit
%A  Csontos JĂĄnos
%A  PĂĄpa Zsuzsanna
%A  Füle Miklós Jenő
%V 571