?url_ver=Z39.88-2004&rft_id=2537453&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.aulast=T%C3%B3th&rft.au=+T%C3%B3th+Zsolt&rft.aufirst=Zsolt&rft.issn=0040-6090&rft.atitle=Ellipsometric+analysis+of+silicon+surfaces+textured+by+ns+and+sub-ps+KrF+laser+pulses&rft.pages=631-636&rft.title=THIN+SOLID+FILMS&rft.volume=571&rft.issue=3&rft.date=2014&rft.genre=article