%T Laser induced backside wet etching of fused silica: absorption coefficient dependence
%P 200-204
%J PROCEEDINGS OF SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING
%O FELTÖLTŐ: Vass Csaba - vasscsaba@physx.u-szeged.hu
%L publicatio9099
%I SPIE - The International Society for Optical Engineering
%R 1084034
%V 5131
%A  Vass Csaba
%A  Hopp BĂŠla
%A  Smausz Tomi
%D 2003