%T Laser induced backside wet etching of fused silica: absorption coefficient dependence %P 200-204 %J PROCEEDINGS OF SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING %O FELTĂLTĹ: Vass Csaba - vasscsaba@physx.u-szeged.hu %L publicatio9099 %I SPIE - The International Society for Optical Engineering %R 1084034 %V 5131 %A Vass Csaba %A Hopp BĂŠla %A Smausz Tomi %D 2003