TY  - JOUR
PB  - SPIE - The International Society for Optical Engineering
VL  - 5131
Y1  - 2003///
SN  - 0277-786X
UR  - http://publicatio.bibl.u-szeged.hu/9099/
EP  - 204
JF  - PROCEEDINGS OF SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING
AV  - public
N1  - FELTÖLT?: Vass Csaba - vasscsaba@physx.u-szeged.hu
A1  -  Vass Csaba
A1  -  Hopp Béla
A1  -  Smausz Tomi
SP  - 200
ID  - publicatio9099
TI  - Laser induced backside wet etching of fused silica: absorption coefficient dependence
ER  -