relation: http://publicatio.bibl.u-szeged.hu/9099/ title: Laser induced backside wet etching of fused silica: absorption coefficient dependence creator: Vass Csaba creator: Hopp Béla creator: Smausz Tomi publisher: SPIE - The International Society for Optical Engineering date: 2003 type: Folyóiratcikk type: PeerReviewed format: text identifier: http://publicatio.bibl.u-szeged.hu/9099/1/2003_Vass_Proceedings_of_SPIE_5131_pp._200_204_u.pdf identifier: Vass Csaba; Hopp Béla; Smausz Tomi: Laser induced backside wet etching of fused silica: absorption coefficient dependence. PROCEEDINGS OF SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING, 5131. pp. 200-204. ISSN 0277-786X (2003) identifier: doi:10.1117/12.513623 relation: 1084034 language: eng relation: info:eu-repo/semantics/altIdentifier/doi/10.1117/12.513623 rights: info:eu-repo/semantics/openAccess