relation: http://publicatio.bibl.u-szeged.hu/9099/
title: Laser induced backside wet etching of fused silica: absorption coefficient dependence
creator:  Vass Csaba
creator:  Hopp Béla
creator:  Smausz Tomi
publisher: SPIE - The International Society for Optical Engineering
date: 2003
type: Folyóiratcikk
type: PeerReviewed
format: text
identifier: http://publicatio.bibl.u-szeged.hu/9099/1/2003_Vass_Proceedings_of_SPIE_5131_pp._200_204_u.pdf
identifier:     Vass Csaba;  Hopp Béla;  Smausz Tomi: Laser induced backside wet etching of fused silica: absorption coefficient dependence.   PROCEEDINGS OF SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING, 5131.  pp. 200-204.  ISSN 0277-786X (2003)     
identifier: doi:10.1117/12.513623
relation: 1084034
language: eng
relation: info:eu-repo/semantics/altIdentifier/doi/10.1117/12.513623
rights: info:eu-repo/semantics/openAccess