?url_ver=Z39.88-2004&rft_id=1084034&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.au=+Vass+Csaba&rft.aufirst=Csaba&rft.aulast=Vass&rft.volume=5131&rft.pages=200-204&rft.title=PROCEEDINGS+OF+SPIE+-+THE+INTERNATIONAL+SOCIETY+FOR+OPTICAL+ENGINEERING&rft.atitle=Laser+induced+backside+wet+etching+of+fused+silica%3A+absorption+coefficient+dependence&rft.issn=0277-786X&rft.date=2003&rft.genre=article