%0 Journal Article %@ 1094-4087 %A Vass Csaba %A Osvay Károly %A Hopp Béla %D 2006 %F publicatio:9097 %J OPTICS EXPRESS %N 18 %P 8354-8359 %T Fabrication of 150 nm Period Grating in Fused Silica by Two-beam Interferometric Laser Induced Backside Wet Etching Method %U http://publicatio.bibl.u-szeged.hu/9097/ %V 14 %Z FELTÖLTŐ: Vass Csaba - vasscsaba@physx.u-szeged.hu