?url_ver=Z39.88-2004&rft_id=1083956&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.au=+Vass+Csaba&rft.aulast=Vass&rft.aufirst=Csaba&rft.date=2006&rft.volume=14&rft.title=OPTICS+EXPRESS&rft.issn=1094-4087&rft.atitle=Fabrication+of+150+nm+Period+Grating+in+Fused+Silica+by+Two-beam+Interferometric+Laser+Induced+Backside+Wet+Etching+Method&rft.pages=8354-8359&rft.issue=18&rft.genre=article