%P 2449-2454 %T Wet Etching of Fused Silica: a Multiplex Study %V 37 %D 2004 %O FELTĂLTĹ: Vass Csaba - vasscsaba@physx.u-szeged.hu %I Institute of Physics Publishing %A Vass Csaba %A Smausz Tomi %A Hopp BĂŠla %J JOURNAL OF PHYSICS D-APPLIED PHYSICS %L publicatio9095 %N 17 %R 1083950