TY  - JOUR
PB  - Institute of Physics Publishing
EP  - 2454
JF  - JOURNAL OF PHYSICS D-APPLIED PHYSICS
VL  - 37
SN  - 0022-3727
SP  - 2449
TI  - Wet Etching of Fused Silica: a Multiplex Study
A1  -  Vass Csaba
A1  -  Smausz Tomi
A1  -  Hopp Béla
IS  - 17
AV  - restricted
N1  - FELTÖLT?: Vass Csaba - vasscsaba@physx.u-szeged.hu
UR  - http://publicatio.bibl.u-szeged.hu/9095/
Y1  - 2004///
ID  - publicatio9095
ER  -