relation: http://publicatio.bibl.u-szeged.hu/9095/
title: Wet Etching of Fused Silica: a Multiplex Study
creator:  Vass Csaba
creator:  Smausz Tomi
creator:  Hopp Béla
publisher: Institute of Physics Publishing
date: 2004
type: Folyóiratcikk
type: PeerReviewed
format: text
identifier: http://publicatio.bibl.u-szeged.hu/9095/1/2004_Vass_J.Phys.D_37_2449_2454_u.pdf
identifier:     Vass Csaba;  Smausz Tomi;  Hopp Béla: Wet Etching of Fused Silica: a Multiplex Study.   JOURNAL OF PHYSICS D-APPLIED PHYSICS, 37 (17).  pp. 2449-2454.  ISSN 0022-3727 (2004)     
identifier: doi:10.1088/0022-3727/37/17/018
relation: 1083950
language: eng
relation: info:eu-repo/semantics/altIdentifier/doi/10.1088/0022-3727/37/17/018
rights: info:eu-repo/semantics/restrictedAccess