relation: http://publicatio.bibl.u-szeged.hu/35991/ title: Micromachining using the high energy flat-top beam of a femtosecond pulse UV laser system: micropillar prefabrication creator: Szabó Péter Imre creator: Ugi Dávid creator: Gilicze Barnabás creator: Dankházi Zoltán creator: Lipcsei Sándor creator: Homik Zsolt creator: Tóth Zsolt subject: 01.03. Fizikai tudományok date: 2023 type: Folyóiratcikk type: PeerReviewed format: text identifier: http://publicatio.bibl.u-szeged.hu/35991/1/micropillar.pdf identifier: Szabó Péter Imre; Ugi Dávid; Gilicze Barnabás; Dankházi Zoltán; Lipcsei Sándor; Homik Zsolt; Tóth Zsolt: Micromachining using the high energy flat-top beam of a femtosecond pulse UV laser system: micropillar prefabrication. APPLIED PHYSICS A - MATERIALS SCIENCE AND PROCESSING, 129 (6). ISSN 0947-8396 (2023) identifier: doi:10.1007/s00339-023-06679-x relation: https://doi.org/10.1007/s00339-023-06679-x relation: 33871039 language: eng