relation: http://publicatio.bibl.u-szeged.hu/35991/
title: Micromachining using the high energy flat-top beam of a femtosecond pulse UV laser system: micropillar prefabrication
creator:  Szabó Péter Imre
creator:  Ugi Dávid
creator:  Gilicze Barnabás
creator:  Dankházi Zoltán
creator:  Lipcsei Sándor
creator:  Homik Zsolt
creator:  Tóth Zsolt
subject: 01.03. Fizikai tudományok
date: 2023
type: Folyóiratcikk
type: PeerReviewed
format: text
identifier: http://publicatio.bibl.u-szeged.hu/35991/1/micropillar.pdf
identifier:     Szabó Péter Imre;  Ugi Dávid;  Gilicze Barnabás;  Dankházi Zoltán;  Lipcsei Sándor;  Homik Zsolt;  Tóth Zsolt: Micromachining using the high energy flat-top beam of a femtosecond pulse UV laser system: micropillar prefabrication.   APPLIED PHYSICS A - MATERIALS SCIENCE AND PROCESSING, 129 (6).   ISSN 0947-8396 (2023)     
identifier: doi:10.1007/s00339-023-06679-x
relation: https://doi.org/10.1007/s00339-023-06679-x
relation: 33871039
language: eng