?url_ver=Z39.88-2004&rft_id=MTMT%3A33871039+10.1007%2Fs00339-023-06679-x&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.au=+Szab%C3%B3+P%C3%A9ter+Imre&rft.aufirst=P%C3%A9ter+Imre&rft.aulast=Szab%C3%B3&rft.issn=0947-8396&rft.atitle=Micromachining+using+the+high+energy+flat-top+beam+of+a+femtosecond+pulse+UV+laser+system%3A+micropillar+prefabrication&rft.volume=129&rft.issue=6&rft.title=APPLIED+PHYSICS+A+-+MATERIALS+SCIENCE+AND+PROCESSING&rft.date=2023&rft.genre=article