Ellipsometric analysis of silicon surfaces textured by ns and sub-ps KrF laser pulses

Tóth, Zsolt, Hanyecz, István, Gárdián, Anett, Budai, Judit, Csontos, János, Pápa, Zsuzsanna, Füle, Miklós Jenő: Ellipsometric analysis of silicon surfaces textured by ns and sub-ps KrF laser pulses.
THIN SOLID FILMS, 571 (3). pp. 631-636. ISSN 0040-6090 (2014)

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Item Type: Article
Journal or Publication Title: THIN SOLID FILMS
Date: 2014
Volume: 571
Number: 3
Page Range: pp. 631-636
ISSN: 0040-6090
Faculty: Faculty of Science and Informatics
Institution: Szegedi Tudományegyetem
MTMT id: 2537453
DOI id: https://doi.org/10.1016/j.tsf.2013.10.102
Date Deposited: 2017. May. 18. 17:07
Last Modified: 2019. Oct. 30. 14:45
URI: http://publicatio.bibl.u-szeged.hu/id/eprint/9236
Web of Science® Times Cited: 6 View citing articles in Web of Science®

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