Ti:sapphire laser ablation of silicon in different ambients

Füle, Miklós Jenő, Gárdián, Anett, Csontos, János, Budai, Judit, Tóth, Zsolt: Ti:sapphire laser ablation of silicon in different ambients.
JOURNAL OF LASER MICRO NANOENGINEERING, 9 (2). pp. 119-125. ISSN 1880-0688 (2014)

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Item Type: Article
Journal or Publication Title: JOURNAL OF LASER MICRO NANOENGINEERING
Date: 2014
Volume: 9
Number: 2
Page Range: pp. 119-125
ISSN: 1880-0688
Faculty: Faculty of Science and Informatics
Institution: Szegedi Tudományegyetem
MTMT id: 2704313
DOI id: https://doi.org/10.2961/jlmn.2014.02.0008
Date Deposited: 2017. May. 12. 10:12
Last Modified: 2019. Oct. 31. 14:15
URI: http://publicatio.bibl.u-szeged.hu/id/eprint/9234
Web of Science® Times Cited: 1 View citing articles in Web of Science®

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