Laser induced backside wet etching of fused silica: absorption coefficient dependence

Vass, Csaba, Hopp, Béla, Smausz, Tomi: Laser induced backside wet etching of fused silica: absorption coefficient dependence.
PROCEEDINGS OF SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING, 5131. pp. 200-204. ISSN 0277-786X (2003)

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Item Type: Article
Journal or Publication Title: PROCEEDINGS OF SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING
Date: 2003
Volume: 5131
Page Range: pp. 200-204
ISSN: 0277-786X
Publisher: SPIE - The International Society for Optical Engineering
Faculty: Faculty of Science and Mathematics
Institution: Szegedi Tudományegyetem
MTMT id: 1084034
DOI id: https://doi.org/10.1117/12.513623
Date Deposited: 2017. May. 03. 10:22
Last Modified: 2019. Oct. 17. 14:47
URI: http://publicatio.bibl.u-szeged.hu/id/eprint/9099

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