Laser induced backside wet etching of fused silica: absorption coefficient dependence

Vass Csaba and Hopp Béla and Smausz Tomi: Laser induced backside wet etching of fused silica: absorption coefficient dependence.
PROCEEDINGS OF SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING, 5131. pp. 200-204. ISSN 0277-786X (2003)

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Creators:
Vass Csaba MTMT
Hopp Béla MTMT
Smausz Tomi MTMT
Item Type: Journal Article
Journal or Publication Title: PROCEEDINGS OF SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING
Date: 2003
Volume: 5131
Page Range: pp. 200-204
ISSN: 0277-786X
Publisher: SPIE - The International Society for Optical Engineering
Faculty/Unit: Faculty of Science and Mathematics
Institution: University of Szeged (2000-)
Language: English
MTMT rekordazonosító: 1084034
DOI azonosító: https://doi.org/10.1117/12.513623
Date Deposited: 2017. May. 03. 10:22
Last Modified: 2019. Oct. 17. 14:47
URI: http://publicatio.bibl.u-szeged.hu/id/eprint/9099
Web of Science® Times Cited: 1 View citing articles in Web of Science®

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