Fabrication of 150 nm Period Grating in Fused Silica by Two-beam Interferometric Laser Induced Backside Wet Etching Method

Vass, Csaba, Osvay, Károly, Hopp, Béla: Fabrication of 150 nm Period Grating in Fused Silica by Two-beam Interferometric Laser Induced Backside Wet Etching Method.
OPTICS EXPRESS, 14 (18). pp. 8354-8359. ISSN 1094-4087 (2006)

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Item Type: Article
Journal or Publication Title: OPTICS EXPRESS
Date: 2006
Volume: 14
Number: 18
Page Range: pp. 8354-8359
ISSN: 1094-4087
Faculty: Faculty of Science and Informatics
Institution: Szegedi Tudományegyetem
Language: English
MTMT id: 1083956
DOI id: https://doi.org/10.1364/OE.14.008354
Date Deposited: 2017. May. 12. 14:54
Last Modified: 2019. Oct. 16. 13:59
URI: http://publicatio.bibl.u-szeged.hu/id/eprint/9097
Web of Science® Times Cited: 34 View citing articles in Web of Science®

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