Experiments And Numerical Calculations For The Interpretation of The Backside Wet Etching of Fused Silica

Vass, Csaba, Hopp, Béla, Smausz, Tomi, Ignácz, Ferenc: Experiments And Numerical Calculations For The Interpretation of The Backside Wet Etching of Fused Silica.
THIN SOLID FILMS, 453-454. pp. 121-126. ISSN 0040-6090 (2004)

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Item Type: Article
Journal or Publication Title: THIN SOLID FILMS
Date: 2004
Volume: 453-454
Page Range: pp. 121-126
ISSN: 0040-6090
Faculty: Faculty of Science and Mathematics
Institution: Szegedi Tudományegyetem
MTMT id: 1083945
DOI id: https://doi.org/10.1016/j.tsf.2003.11.081
Date Deposited: 2017. May. 12. 12:15
Last Modified: 2019. Oct. 16. 13:55
URI: http://publicatio.bibl.u-szeged.hu/id/eprint/9094

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