Vass Csaba and Hopp Béla and Smausz Tomi and Ignácz Ferenc:
Experiments And Numerical Calculations For The Interpretation of The Backside Wet Etching of Fused Silica.
THIN SOLID FILMS, 453-454.
pp. 121-126.
ISSN 0040-6090
(2004)
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| Item Type: | Journal Article | ||||
| Journal or Publication Title: | THIN SOLID FILMS | ||||
| Date: | 2004 | ||||
| Volume: | 453-454 | ||||
| Page Range: | pp. 121-126 | ||||
| ISSN: | 0040-6090 | ||||
| Faculty/Unit: | Faculty of Science and Mathematics | ||||
| Institution: | University of Szeged (2000-) | ||||
| Language: | English | ||||
| MTMT rekordazonosító: | 1083945 | ||||
| DOI azonosító: | https://doi.org/10.1016/j.tsf.2003.11.081 | ||||
| Date Deposited: | 2017. May. 12. 12:15 | ||||
| Last Modified: | 2019. Oct. 16. 13:55 | ||||
| URI: | http://publicatio.bibl.u-szeged.hu/id/eprint/9094 |
| Web of Science® Times Cited: 57 | View citing articles in Web of Science® |
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