Reducing the incubation effects for rear side laser etching of fused silica

Zimmer, Klaus, Ehrhardt, Martin, Lorenz, Pierre, Wang, Xi, Vass, Csaba, Csizmadia, Tamás, Hopp, Béla: Reducing the incubation effects for rear side laser etching of fused silica.
APPLIED SURFACE SCIENCE, 302. pp. 42-45. ISSN 0169-4332 (2014)

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Item Type: Article
Journal or Publication Title: APPLIED SURFACE SCIENCE
Date: 2014
Volume: 302
Page Range: pp. 42-45
ISSN: 0169-4332
Publisher: Elsevier
Faculty: Faculty of Science and Informatics
Institution: Szegedi Tudományegyetem
MTMT id: 2700073
DOI id: https://doi.org/10.1016/j.apsusc.2014.01.115
Date Deposited: 2017. May. 12. 11:25
Last Modified: 2019. Oct. 18. 10:22
URI: http://publicatio.bibl.u-szeged.hu/id/eprint/9093
Web of Science® Times Cited: 12 View citing articles in Web of Science®

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