Thickness distribution of carbon nitride films grown by inverse pulsed laser deposition

Égerházi, László, Geretovszky, Zsolt, Szörényi, Tamás: Thickness distribution of carbon nitride films grown by inverse pulsed laser deposition.
APPLIED SURFACE SCIENCE, 247. pp. 182-187. ISSN 0169-4332 (2005)

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Item Type: Article
Journal or Publication Title: APPLIED SURFACE SCIENCE
Date: 2005
Volume: 247
Page Range: pp. 182-187
ISSN: 0169-4332
Faculty: Faculty of Science and Informatics
Institution: Szegedi Tudományegyetem
MTMT id: 155819
DOI id: https://doi.org/10.1016/j.apsusc.2005.01.041
Date Deposited: 2020. Feb. 04. 08:40
Last Modified: 2020. Feb. 04. 08:40
URI: http://publicatio.bibl.u-szeged.hu/id/eprint/18151
Web of Science® Times Cited: 20 View citing articles in Web of Science®

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