Carbon nitride films of uniform thickness by inverse PLD

Égerházi, László, Geretovszky, Zsolt, Szörényi, Tamás: Carbon nitride films of uniform thickness by inverse PLD.
APPLIED SURFACE SCIENCE, 253 (19). pp. 8197-8200. ISSN 0169-4332 (2007)

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Item Type: Article
Journal or Publication Title: APPLIED SURFACE SCIENCE
Date: 2007
Volume: 253
Number: 19
Page Range: pp. 8197-8200
ISSN: 0169-4332
Faculty: Faculty of Medicine
Faculty of Science and Informatics
Institution: Szegedi Tudományegyetem
MTMT id: 155768
DOI id: https://doi.org/10.1016/j.apsusc.2007.02.127
Date Deposited: 2020. Feb. 04. 08:25
Last Modified: 2020. Feb. 04. 08:25
URI: http://publicatio.bibl.u-szeged.hu/id/eprint/18149
Web of Science® Times Cited: 4 View citing articles in Web of Science®

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