Oblique drilling by Ti: Sapphire fs laser in silicon

Gárdián, Anett, Budai, Judit, Füle, Miklós Jenő, Tóth, Zsolt: Oblique drilling by Ti: Sapphire fs laser in silicon.
JOURNAL OF LASER MICRO NANOENGINEERING, 10 (1). pp. 81-86. ISSN 1880-0688 (2015)

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Item Type: Article
Journal or Publication Title: JOURNAL OF LASER MICRO NANOENGINEERING
Date: 2015
Volume: 10
Number: 1
Page Range: pp. 81-86
ISSN: 1880-0688
Faculty: Faculty of Dentistry
Faculty of Science and Informatics
Institution: Szegedi Tudományegyetem
MTMT id: 2844602
DOI id: https://doi.org/10.2961/jlmn.2015.01.0015
Date Deposited: 2017. Oct. 20. 08:59
Last Modified: 2020. Mar. 25. 09:07
URI: http://publicatio.bibl.u-szeged.hu/id/eprint/12129

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