Periodic surface structure creation by UV femtosecond pulses on silicon

Gilicze, Barnabás, Moczok, Márió, Madarász, Dániel, Juhász, Nóra, Racskó, Bence, Nánai, László: Periodic surface structure creation by UV femtosecond pulses on silicon.
AIP Conference Proceedings, 1796. Terjedelem: 5 -Azonosító: Paper 10.1063/1.4972366 . ISSN 0094-243X (2017)

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Item Type: Article
Journal or Publication Title: AIP Conference Proceedings
Date: 2017
Volume: 1796
Page Range: Terjedelem: 5 -Azonosító: Paper 10.1063/1.4972366
ISSN: 0094-243X
Faculty: Gyula Juhász Faculty of Education
Faculty of Science and Informatics
Institution: Szegedi Tudományegyetem
MTMT id: 3187830
DOI id: https://doi.org/10.1063/1.4972366
Date Deposited: 2017. Feb. 28. 18:22
Last Modified: 2019. Jul. 30. 14:35
URI: http://publicatio.bibl.u-szeged.hu/id/eprint/10905

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